Extreme Ultraviolet Lithography: Principles and Basic Technologies - Hiroo Kinoshita
-20% with code BOOKS
Shipping in 12-18 days
30-day return policy
This book describes the principles and basic technologies of extreme ultraviolet lithography (EUVL). The topics include why research on EUVL was begun and why an exposure wavelength of 13.5 nm was selected; the design of the optical system, which employs reflective mirrors; the use of a multilayer film to make a reflective-type mask and how masks are inspected; an historical overview of the development of l ... Full description
You May Also Like
TOP
Determined: The Science of Life Without Free Will
-20% with code BOOKS
In stock at our supplier
TOP
The Light Eaters: How the Unseen World of Plant Intelligence Offers a New Understanding of Life on Earth
-20% with code BOOKS
In stock at our supplier
TOP
Why We Sleep: Unlocking the Power of Sleep and Dreams
-20% with code BOOKS
In stock
TOP
The Rise and Fall of the Dinosaurs: A New History of a Lost World
-20% with code BOOKS
In stock at our supplier
TOP
Biology: A Global Approach, Global Edition
Neil Campbell, Rebecca Orr, Lisa Urry, Peter Minorsky, Michael Cain, Jane Reece, Steven Wasserman
-20% with code BOOKS
In stock at our supplier
TOP
Six Not-so-easy Pieces: Einstein's Relativity, Symmetry, and Space-Time
Richard P. Feynman, Robert B. Leighton, Matthew Sands
-20% with code BOOKS
In stock at our supplier
TOP
The Age of Alchemy: How Early Innovators Shaped Modern Chemistry
-20% with code BOOKS
In stock at our supplier
TOP
The Secrets of our DNA: How Genetics has Changed the World
-20% with code BOOKS
In stock at our supplier
TOP
Janeway's Immunobiology
Leslie J. Berg, Kenneth Murphy, Casey Weaver
-20% with code BOOKS
In stock at our supplier
TOP
How to Solve it: A New Aspect of Mathematical Method
-20% with code BOOKS
In stock at our supplier
TOP
Factfulness: Ten Reasons We're Wrong About the World--and Why Things Are Better Than You Think
Ola Rosling, Anna Rosling Rönnlund, Hans Rosling
-20% with code BOOKS
In stock at our supplier
TOP
Why Machines Learn: The Elegant Maths Behind Modern AI
-20% with code BOOKS
In stock at our supplier
TOP
The Feynman Lectures on Physics. The New Millennium Edition
Matthew Sands, Robert Leighton, Richard Feynman
-20% with code BOOKS
In stock at our supplier
TOP
Seven Brief Lessons on Physics
-20% with code BOOKS
In stock at our supplier
TOP
Entangled Life: How Fungi Make Our Worlds, Change Our Minds and Shape Our Futures
-20% with code BOOKS
In stock at our supplier
TOP
Life As No One Knows It: The Physics of Life's Emergence
-20% with code BOOKS
In stock at our supplier
TOP
The Rise and Reign of the Mammals: A New History, from the Shadow of the Dinosaurs to Us
-20% with code BOOKS
In stock at our supplier
TOP
Learn Faster, Perform Better: A Musician's Guide to the Neuroscience of Practicing
-20% with code BOOKS
In stock at our supplier
TOP
The Road to Reality: A Complete Guide to the Laws of the Universe
-20% with code BOOKS
In stock at our supplier
Description
This book describes the principles and basic technologies of extreme ultraviolet lithography (EUVL). The topics include why research on EUVL was begun and why an exposure wavelength of 13.5 nm was selected; the design of the optical system, which employs reflective mirrors; the use of a multilayer film to make a reflective-type mask and how masks are inspected; an historical overview of the development of light sources; resist materials; and the recent performance of lithographic tools for mass production. Three innovations were key to the development: of Mo/Si multilayer films with a high reflectivity and to the shaping and metrology of aspherical mirrors with a precision of less than 0.1 nm. The technology for measuring figure error and the fabrication technology now meet the performance targets. Thus, EUVL has become the most promising lithographic technology for device fabrication at the 7-nm node.
More Information
| Author | Hiroo Kinoshita |
|---|---|
| Publisher | LAP Lambert Academic Publishing |
| Release year | 2016 |
| Cover type | Softcover |
| EAN | 9783659827402 |