Mechanical Microsensors - Miko Elwenspoek,Remco J. Wiegerink
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This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and ... Full description
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Description
More Information
| Author | Miko Elwenspoek, Remco J. Wiegerink |
|---|---|
| Publisher | Springer Science & Business Media |
| Release year | 2001 |
| Cover type | Hardcover |
| EAN | 9783540675822 |