Microlithography: Science and Technology -
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Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
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Description
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
More Information
| Publisher | CRC Press |
|---|---|
| Release year | 2024 |
| Cover type | Softcover |
| EAN | 9781032836737 |