Books by MEMS Reference Shelf
Microfluidic Technologies for Miniaturized Analysis Systems
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MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness
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Microfluidic Technologies for Miniaturized Analysis Systems
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MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness
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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
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RF MEMS Switches and Integrated Switching Circuits
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Radioisotope Thin-Film Powered Microsystems
Amit Lal, Rajesh Duggirala, Shankar Radhakrishnan
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MEMS Reliability
Mark G. Da Silva, Allyson L. Hartzell, Herbert R. Shea
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Silicon Carbide Microsystems for Harsh Environments
Robert Azevedo, Muthu Wijesundara
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